Publication | Closed Access
Influence of ion energy and flux composition on the properties of plasma-deposited amorphous carbon and amorphous hydrogenated carbon films
55
Citations
6
References
1993
Year
Materials ScienceCarbon FilmsEngineeringApplied PhysicsAmorphous SolidGas Discharge PlasmaPlasma ProcessingIon EnergyFlux Composition
| Year | Citations | |
|---|---|---|
Page 1
Page 1