Sputtering of an AgAu alloy by bombardment with 6 keV Xe⁺ions

Abstract

The energy distributions of silver and gold atoms sputtered from an AgAu alloy by bombardment with a 6 keV Xe+ ion beam have been measured and compared with those from the pure elements. Total sputtering yields of the investigated samples have also been measured. The results show that in addition to collision cascades, spike effects contribute to the sputtering. The experimentally deduced binding energies of Ag and Au atoms in the AgAu alloy surface are lower than for pure elements which accounts for the higher sputtering yield of the AgAu alloy which the authors observed. The existing experimental data on composition changes of the AgAu surface during ion bombardment can be explained in the light of present measurements.