Generalized ellipsometry effective medium approximation analysis approach for porous slanted columnar thin films infiltrated with polymer

Abstract

Views Icon Views Article contents Figures & tables Video Audio Supplementary Data Peer Review Share Icon Share Twitter Facebook Reddit LinkedIn Tools Icon Tools Reprints and Permissions Cite Icon Cite Search Site Citation D. Liang, D. Schmidt, H. Wang, E. Schubert, M. Schubert; Generalized ellipsometry effective medium approximation analysis approach for porous slanted columnar thin films infiltrated with polymer. Appl. Phys. Lett. 9 September 2013; 103 (11): 111906. https://doi.org/10.1063/1.4821159 Download citation file: Ris (Zotero) Reference Manager EasyBib Bookends Mendeley Papers EndNote RefWorks BibTex toolbar search Search Dropdown Menu toolbar search search input Search input auto suggest filter your search All ContentAIP Publishing PortfolioApplied Physics Letters Search Advanced Search |Citation Search