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Effect of oxygen content and deposition temperature on the characteristics of thin silver films deposited by magnetron sputtering

Materials ScienceMaterials EngineeringEngineeringNanotechnologySurface ScienceApplied PhysicsMagnetron SputteringMagnetic Thin FilmsThin FilmsChemical DepositionChemical Vapor DepositionOxygen ContentThin Film ProcessingThin Silver Films