Cluster-solid interactions: A molecular dynamics investigation

Abstract

Abstract The interaction of small energetic clusters of metal atoms with surfaces has been investigated by molecular dynamics computer simulations. A wide variety of cluster-solid combinations have been studied so that the effects of the energy, size, and angle of incidence of the cluster, and the relative elastic properties of the cluster and substrate could be elucidated. ‘Soft landings’ were also investigated. From these studies, a mechanism map for cluster-solid interactions is developed. The results have particular importance for cluster beam deposition of thin films. The simulations are fully dynamical and 3-dimensional; they employ embedded-atom method potentials, which have been modified for interactions at close separations. A scheme for reducing the CPU time that is required for these and other simulations of radiation effects is described.