Journal of Applied Physics · 1991 · 54 citations · 6 references
Natural SciencesMaterials SciencePhysicsMaterials PhysicsSemiconductor MaterialsSpectroscopyOptical Properties Of SemiconductorsRare-earth-doped MaterialsSemiconductor InterfacesSilicon MaterialsCzochralski Crystal GrowthOxygen Vacancy ChemistryOxygen Vacancy FormationSemiconductor CrystallographySemiconductor Infrared MaterialsSpectral Absorption Bands
Evidence for interaction between the N-N pair and interstitial O in N-doped Czochralski silicon has been presented by studying the annealing behavior of the corresponding IR absorption bands.
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Calibration curve for infrared spectrophotometry of nitrogen in silicon
Yoshiko Itoh, Tadashi Nozaki, T. Masui et al. · Applied Physics Letters · 1985 · 76 citations