The evidence for interaction of the N-N pair with oxygen in Czochralski silicon

Ming Qi, S.S. Tan, Bo Zhu, Peijie Cai, Wen Gu, Xixiang Xu, Tian-En Shi, Duanlin Que, L. B. Li

Journal of Applied Physics · 1991 · 54 citations · 6 references

Concepts

Abstract

Evidence for interaction between the N-N pair and interstitial O in N-doped Czochralski silicon has been presented by studying the annealing behavior of the corresponding IR absorption bands.

References

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