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Effect of pore generating materials on the electrical and mechanical properties of porous low-k films

Materials ScienceMaterials EngineeringElectrical EngineeringPore StructureEngineeringNanoporous MaterialMechanical PropertiesPorous MembraneApplied PhysicsPorosityThin FilmsPorous Low-k FilmsPorous BodyElectrochemistryElectrical Insulation