Publication | Closed Access
The thermal ionization cavity (TIC) source: elucidation of possible mechanisms for enhanced ionization efficiency
36
Citations
43
References
2002
Year
Enhanced Ionization EfficiencyChemical EngineeringElectrical EngineeringEngineeringIon ImplantationPossible MechanismsThermal Ionization CavityIon BeamIon EmissionIon Process
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