Measurement Of Scattering Distribution For Characterization Of The Roughness Of Coated Or Uncoated Substrates

Abstract

Measurement of spatial distribution of scattered flux combined with a vector theory of surface scattering, leads to the characterization of micropolishes in modern optics. Our techniques for transparent and non-transparent substrates are described. When applied to multilayer optical coatings, the scattering studies give informations on material microstructure defects. Recent developments realized in Marseilles in this field are analized.