Journal of Applied Physics · 1973 · 43 citations · 9 references
Biomedical AcousticsAeroacousticsEngineeringPiezoelectric WavesAcoustic MetamaterialVibrationsPhysical AcousticFilm OverlayPiezoelectric MaterialInstrumentationPiezoelectric FilmsMaterials ScienceAcoustic MethodsRayleigh WavesUltrasonicsAcoustic PropagationPiezoelectric MaterialsPiezoelectricityUltrasoundAcoustic Wave DevicesSurface ScienceApplied PhysicsTransducer PrincipleMicromachined Ultrasonic Transducer
A set of computer programs has been developed for calculating the velocity of acoustic surface waves on a substrate with or without a film overlay where both the film and the substrate may be arbitrarily anisotropic and piezoelectric. Several examples of practical significance are presented. These include (i) propagation around the curved surface of a wrap-around delay line, (ii) power flow angles for Rayleigh waves on LiNbO3 and Bi12GeO20 substrates, (iii) enhancement in the performance of an interdigital transducer due to the deposition of a film overlay (values of Δν/ν as large as 5.45% have been calculated), (iv) Δν/ν curves for piezoelectric films on nonpiezoelectric substrates.
9