Concepedia

Publication | Closed Access

Antimony implanted in silicon – A thin layer reference material for surface analysis

DOI

16

Citations

2

References

2001

Year

Klaus Ecker, Achim Berger, R. Grötzschel, L. Persson, U. Wätjen
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

References

YearCitations

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