Publication | Closed Access
Stress evolution in passivated thin films of Cu on silica substrates
57
Citations
25
References
1998
Year
Materials ScienceMaterial AnalysisEngineeringSurface ScienceApplied PhysicsPassivated Thin FilmsStress EvolutionThin FilmsChemical Vapor DepositionEpitaxial GrowthSilica SubstratesThin Film Processing
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