Determination of negative-ion and electron parameters in an Ar/SF6 plasma

Abstract

A new method for evaluating negative ion and electron parameters from the current–voltage characteristics of electric probes is presented. A theoretical model and its related numerical procedures are established and errors included are estimated. Temperatures and densities of negative ions and electrons in a magnetic multipolar-confined plasma of Ar and Ar/SF6 mixtures are determined with allowable errors for various density ratios of the negative ion to the electron.