Preparation of highly oriented AlN thin films on glass substrates by helicon plasma sputtering and design of experiments - Concepedia

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Preparation of highly oriented AlN thin films on glass substrates by helicon plasma sputtering and design of experiments

38

Citations

22

References

1999

Year

Morito Akiyama, Tomohiro Harada, Chao‐Nan Xu, Kazuhiro Nonaka, Tadahiko Watanabe

Thin Solid Films

Materials ScienceMaterials EngineeringAluminium NitrideEngineeringHelicon Plasma SputteringPhysicsSurface ScienceApplied PhysicsGlass SubstratesThin FilmsChemical Vapor DepositionPlasma ProcessingAln Thin FilmsThin Film Processing

References

	Year	Citations

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