Concepedia

Publication | Closed Access

Lattice damage and nanohardness in 6H–SiC implanted with multiple-energy Xe ions

DOI

19

Citations

21

References

2011

Year

J.J. Li, C.H. Zhang, Chaoliang Xu, Xiao Jia, Yin Song, Jianyang Li, Yuanwei Jin
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

References

YearCitations

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