58.1: A 4.1‐Inch Flexible QVGA AMOLED Using a Microcrystalline‐Si:H TFT on a Polyimide Substrate

Abstract

Abstract A 4.1‐inch flexible QVGA AMOLED display with microcrystalline silicon (μc‐Si:H) TFTs backplane on colorless polyamide (PI) substrate is demonstrated. The PI substrate has the features of high T g (∼350°C) and high light transmittance (∼90%). The bottom‐gate μc‐Si:H TFTs backplane is fabricated at 200°C by a conventional (13.56 MHz) plasma‐enhanced chemical vapor deposition (PECVD) system. The flexible μc‐Si:H TFTs backplane shows better electrical stability, flexibility, and uniformity.