Publication | Closed Access

Formation of size-controlled silicon nanocrystals in plasma enhanced chemical vapor deposition grown SiOxNy/SiO2 superlattices

Materials ScienceEngineeringNanomaterialsNanotechnologyApplied PhysicsSioxny/sio2 SuperlatticesSize-controlled Silicon NanocrystalsSiliceneNanostructure SynthesisSilicon On InsulatorNanocrystalline MaterialChemical Vapor Deposition