Scanning-electron-microscope-written gratings in chalcogenide films for optical integrated circuits

Abstract

Scanning-electron-microscope-written gratings in amorphous chalcogenide thin films have interesting and promising characteristics as guided-wave optical components. As a first trial to demonstrate their use in integrated optics, we have designed and fabricated the gratings for deflecting and splitting the guided waves and experimentally confirmed their excellent optical performance of high efficiency and wide acceptanceangle.