Concepedia

Publication | Closed Access

Optimisation of the new time-modulated CVD process using the Taguchi method

DOI

43

Citations

24

References

2004

Year

N. Ali, Victor Neto, Sen Mei, G. Cabral, Elby Titus, A. A. Ogwu, D.S. Misra, J. Grácio
Thin Solid Films

References

YearCitations

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