Publication | Closed Access
Deposition of TiN films using a thermal plasma reactive forming technology
12
Citations
5
References
1996
Year
Materials EngineeringMaterials ScienceTin FilmsEngineeringPowder MetallurgyApplied PhysicsChemical Vapor DepositionThin FilmsChemical DepositionPlasma Processing3D PrintingThin Film Processing
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