Plasma etching of DLC films for microfluidic channels

A phenomenological approach for the Id/Ig ratio and sp3 fraction of magnetron sputtered a-C films

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Materials Science, Magnetism, Engineering +11

Electroconductivity of amorphous carbon films containing silicon and tungsten

A. D. Bozhko, Mario Berrettoni, S. Chudinov et al. · Diamond and Related Materials · 1995 · 19 citations

Strain measurements of SiGeC heteroepitaxial layers on Si(001) using ion beam analysis

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Engineering, Strain Measurements, Silicon On Insulator +17