Stoichiometry and characterization of aluminum oxynitride thin films grown by ion-beam-assisted pulsed laser deposition - Concepedia

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Stoichiometry and characterization of aluminum oxynitride thin films grown by ion-beam-assisted pulsed laser deposition

22

Citations

42

References

2007

Year

J.S. Zabinski, Jianjun Hu, J.E. Bultman, Neal Pierce, Andrey A. Voevodin

Thin Solid Films

Materials EngineeringMaterials ScienceAluminium NitrideEngineeringApplied PhysicsLaser DepositionLaser-assisted DepositionThin FilmsPulsed Laser DepositionChemical DepositionThin Film Processing

References

	Year	Citations

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