Publication | Closed Access
Young modulus and Poisson ratio measurements of TiO2 thin films deposited with Atomic Layer Deposition
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Citations
29
References
2011
Year
Materials ScienceYoung ModulusEngineeringNanotechnologyOxide ElectronicsSurface ScienceApplied PhysicsPoisson Ratio MeasurementsThin FilmsTio2 Thin FilmsChemical DepositionChemical Vapor DepositionThin Film Processing
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