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A precision capacitance cell for measurement of thin film out-of-plane expansion. II. Hygrothermal expansion
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Citations
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References
1999
Year
EngineeringMechanical EngineeringExperimental ThermodynamicsThin Film Process TechnologyPrecision Capacitance CellCapacitance CellHygrothermal ExpansionThermal AnalysisThermodynamicsElectronic PackagingThin Film ProcessingMaterials ScienceMaterials EngineeringElectrical EngineeringHumid EnvironmentHeat TransferMicroelectronicsData Reduction TechniquesSurface ScienceApplied PhysicsPorosityThin FilmsThermal EngineeringThermophysical Property
The data reduction techniques necessary for utilizing the capacitance cell described previously by us for thickness measurements [C. R. Snyder and F. I. Mopsik, Rev. Sci. Instrum. 69, 3889 (1998)] in a humid environment are presented. It is demonstrated that our data reduction techniques provide thicknesses that are equivalent to those measured under dry conditions within the expected experimental uncertainty. The utility of this technique is demonstrated by the measurement of the hygrothermal expansion (swelling) of a bisphenol-A based epoxy with novolac hardener and fused silica filler. Our technique is shown to have a higher sensitivity than most current thermomechanical analysis techniques and is readily amenable to humid conditions.
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