Comparative status of pulsed ion implantation

Metal vapor vacuum arc ion source

I.G. Brown, James E. Galvin, B. Gavin et al. · Review of Scientific Instruments · 1986 · 182 citations

Natural Sciences, Nuclear Engineering, Physics +13

High energy ion beam modification of polymer films

T. Venkatesan · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1985 · 170 citations

Natural Sciences, Materials Engineering, Materials Science +11

Ion beam annealing of semiconductors

R. T. Hodgson, J. E. E. Baglin, Rikathi Pal et al. · Applied Physics Letters · 1980 · 106 citations

Engineering, Materials Engineering, Materials Science +12

Generation of intense pulsed ion beams

S. Humphries, J. J. Lee, R. N. Sudan · Applied Physics Letters · 1974 · 103 citations · Full text

Natural Sciences, Nuclear Engineering, Physics +17

Repetitively pulsed metal ion beams for ion implantation

R. J. Adler, S. T. Picraux · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1985 · 102 citations

Natural Sciences, Physics, Plasma Physics +4