Gettering of iron in silicon by boron implantation - Concepedia

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Gettering of iron in silicon by boron implantation

15

Citations

13

References

2008

Year

Antti Haarahiltunen, H. Talvitie, Hele Savin, Olli Anttila, Marko Yli‐Koski, Muhammad Imran Asghar, J. Sinkkonen

Journal of Materials Science Materials in Electronics

Materials ScienceMaterials EngineeringIon ImplantationSinteringEngineeringBoron ImplantationApplied PhysicsSilicon On InsulatorMicrostructure

References

	Year	Citations

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