Specific properties of the PZT-based thin-film capacitor structures with excess lead oxide

Abstract

The effect of excess lead oxide on the microstructure and ferroelectric properties of lead zirconate titanate (PZT) films was studied in PZT-based thin-film capacitor structures. It is shown that excess lead in the form of lead oxide is localized at the grain boundaries and film-platinum electrode interfaces, which can result in the appearance of internal electric fields and the self-polarization of PZT films. It is suggested that the selfpolarization effect is related to the formation of a built-in electric charge with different densities at the bottom and top metal electrode-ferroelectric film interfaces.