Publication | Closed Access
Composition–constitution–morphology relationship of Al2O3 thin films deposited by plasma assisted chemical vapor deposition
22
Citations
45
References
2009
Year
Materials ScienceEngineeringSurface ScienceApplied PhysicsAl2o3 Thin FilmsThin Film Process TechnologyThin FilmsChemical DepositionComposition–constitution–morphology RelationshipChemical Vapor DepositionThin Film Processing
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