Concepedia

Publication | Closed Access

Film growth and relationship between microstructure and mechanical properties of a-C:H:F films deposited by PECVD

DOI

53

Citations

30

References

2001

Year

F. L. Freire, M.E.H. Maia da Costa, Luiz G. Jacobsohn, D. F. Franceschini
Diamond and Related Materials

References

YearCitations

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