Continuous Ellipsometric Determination of the Optical Constants and Thickness of a Silver Film during Deposition

Abstract

A method for obtaining the optical constants and thickness of thin metal films during deposition using an automatic recording ellipsometer is described. The restored azimuth ψ , the differential phase change on reflection Δ and the transmittance T have been continuously meaured during the film deposition. The optical constants and the packing factor are calculated from these three quantities and are given as functions of film thickness for various deposition conditions.