Concepedia

Effect of growth temperature and coating cycles on structural, electrical, optical properties and stability of ITO films deposited by magnetron sputtering

Jiwen Xu, Zupei Yang, Hua Wang, Huarui Xu, Xiaowen Zhang

Materials Science in Semiconductor Processing · 2014 · 35 citations · 19 references

DOI

Concepts

References

19

Transparent and conducting ITO films: new developments and applications

C. G. Granqvist, A. Hultåker · Thin Solid Films · 2002 · 982 citations

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Comparative study of ITO layers deposited by DC and RF magnetron sputtering at room temperature

F. Kurdesau, A.F. da Cunha, M. Kaelin et al. · Journal of Non-Crystalline Solids · 2006 · 188 citations

, , +14

Effect of sputtering power on the structural and optical properties of RF magnetron sputtered ITO films

Wen-Fa Wu, Shu-Ta Hsieh · Semiconductor Science and Technology · 1994 · 130 citations

, , +17

Low resistivity ITO film prepared using the ultra high density ITO target

Kentaro Utsumi, Osamu Matsunaga, T. Takahata · Thin Solid Films · 1998 · 114 citations

, , +11

Development of indium tin oxide film texture during DC magnetron sputtering deposition

Yeon Sik Jung · Journal of Crystal Growth · 2003 · 89 citations

, , +16