Proton beam writing of submicrometer structures at LIPSION

Three-dimensional nanolithography using proton beam writing

J.A. van Kan, Andrew A. Bettiol, F. Watt · Applied Physics Letters · 2003 · 160 citations

Engineering, Materials Engineering, Materials Science +17

Optical band gaps of selected ternary sulfide minerals

Steven I. Boldish, William B. White · American Mineralogist · 1998 · 143 citations

Natural Sciences, Chemistry, Earth Sciences +17

Fabrication of high aspect ratio 100nm metallic stamps for nanoimprint lithography using proton beam writing

K. Ansari, J.A. van Kan, Andrew A. Bettiol et al. · Applied Physics Letters · 2004 · 107 citations

Engineering, Materials Engineering, Materials Science +15

Resist materials for proton micromachining

J.A. van Kan, J.L. Sanchez, Bing Xu et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1999 · 57 citations

Engineering, Materials Engineering, Materials Science +7

Micromachining of silicon with a proton microbeam

P. Polesello, C. Manfredotti, F. Fizzotti et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1999 · 37 citations

Engineering, Materials Engineering, Materials Science +12