Concepedia

Publication | Open Access

Carbon nanotube vertical membranes for electrostatically actuated micro-electro-mechanical devices

DOIFull Paper Access

10

Citations

3

References

2009

Year

A. Arun, D. Acquaviva, Montserrat Fernández-Bolaños, P. Salet, H. Le-Poche, Philippe Pantigny, Tonio Idda, Adrian M. Ionescu
Microelectronic Engineering

References

YearCitations

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