Lattice disorder in LiNbO3 crystals induced by MeV Cu+ implantation

Abstract

The effects of 1 MeV Cu ion implantation in LiNbO3 crystals have been investigated using the Rutherford backscattering/channeling technique. The samples have been implanted with doses ranging from 5×1014 ions/cm2 to 2×1015 ions/cm2. The damage profiles have been deconvoluted from Rutherford backscattering spectra after considering the energy spreading due to difference of stopping power between nonchanneled and channeled particles. The energy dependence of the scattering cross section and stopping power have also been taken into account. The damage profiles have compared with TRIM’89 (Transport of Ions in Matter, version 1989) code calculation. For the lowest dose (5×1014 ions/cm2) implantation, the damage profile is in agreement with the defect profile calculated using the trim code. The damage peak is located shallower than the theoretical ion mean projected range, but the damage spread is larger than the ion spread. For higher dose implantations, a broadening of the damage profiles is observed, probably due to radiation enhanced defect migration during ion implantation. For doses higher than 2×1015 ions/cm2, an amorphous layer will be observed in the LiNbO3 crystal.