Investigation of nanocrystal-(Ti,Al)Nx/amorphous-SiNy composite films by co-deposition process - Concepedia

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Investigation of nanocrystal-(Ti,Al)Nx/amorphous-SiNy composite films by co-deposition process

21

Citations

21

References

2004

Year

Bao‐Shun Yau, Jow-Lay Huang, Ding‐Fwu Lii, Pavol Šajgalı́k

Surface and Coatings Technology

Materials EngineeringMaterials ScienceEngineeringApplied PhysicsAmorphous SolidThin Film ProcessingCo-deposition Process

References

	Year	Citations

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