Publication | Closed Access
Triode technology in the sputter deposition of carbon films
12
Citations
12
References
1988
Year
Materials EngineeringMaterials ScienceEngineeringNanoelectronicsSurface ScienceApplied PhysicsTriode TechnologyThin FilmsChemical DepositionCarbon-based FilmsChemical Vapor DepositionThin Film Processing
| Year | Citations | |
|---|---|---|
Page 1
Page 1