Physics of the krypton fluoride laser

Abstract

The extremely complex kinetics of pumping, quenching, and absorption in krypton fluoride excimer lasers is now relatively well understood. A single comprehensive kinetic model, solved approximately by analytic means and more exactly by a computer code of moderate size, is capable of simulating with great accuracy the performance of KrF lasers pumped by e-beam sustained discharge, and self-sustained discharge. We present the results of applications of this model to interpret and predict the limiting behavior and scaling of KrF lasers. A measure of remaining uncertainties is discussed.