SEM observations of SAW resonator transverse modes

Abstract

The acoustic standing-wave antinode structure has been observed using SEM voltage contrast in a two-port SAW resonator on ST-cut quartz. All transverse resonant modes up to seventh order are visible and agree qualitatively with theoretical predictions. Some phase effects, including antinode shifts near resonance and alternation of antinode phase, have been seen. This technique may be useful in understanding and diagnosing SAW resonator behavior.