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Si incorporation in InP using a disilane source in metalorganic vapour phase epitaxy at atmospheric pressure

Materials ScienceEngineeringSi IncorporationSurface ScienceApplied PhysicsAtmospheric PressureVacuum DeviceChemistryMolecular Beam EpitaxyDisilane SourceEpitaxial GrowthChemical Vapor DepositionSilicon On Insulator