Diamond and Related Materials · 1993 · 10 citations · 4 references
Natural SciencesMaterials EngineeringMaterials ScienceElectronic MaterialsPlasma PhysicsThin FilmsChemical Vapor DepositionPhysical Vapor DepositionPlasma Surface TreatmentPlasma-surface InteractionsPlasma-wall InteractionsArc DischargesArc Plasma PhysicsHollow Cathode DischargesHollow CathodesPlasma-enhanced Deposition
4
Bias-controlled chemical vapor deposition of diamond thin films
Y. H. Lee, P. D. Richard, K. J. Bachmann et al. · Applied Physics Letters · 1990 · 40 citations
Natural Sciences, Materials Engineering, Materials Science +11