Magnetic near-field probe for GHz band and spatial resolution improvement technique

Abstract

This paper reports magnetic near-field probe for high frequency band up to 10 GHz and novel measurement technique for improvement of spatial resolution. We fabricated two types of magnetic near-field probe and evaluated frequency characteristics for magnetic and electric near-field in isolation. For the measurement results, we proposed accurate equivalent circuit of probes and evaluated each value of lumped parameter to study the difference of probes. Theoretical results accorded with measurement results. With the use of a fabricated probe, a measurement technique for the improvement of spatial resolution was proposed. This technique allows improving and easy modification of spatial resolution without redesign of probe