Concepedia

Machine learning-based novelty detection for faulty wafer detection in semiconductor manufacturing

Dongil Kim, Pilsung Kang, Sungzoon Cho, Hyoungjoo Lee, Seungyong Doh

Expert Systems with Applications · 2011 · 122 citations · 26 references

Concepts

ComputingComputer ScienceManufacturing EngineeringData MiningMachine LearningSemiconductor DevicesDefect DetectionDiagnosisFault DetectionFault DiagnosisManufacturing DefectsSemiconductor DefectsAnomaly Detection In ManufacturingFault Detection Using Machine LearningMachine Learning-based Defect DetectionManufacturingProcess Anomaly DetectionReal-time Defect DetectionSemiconductor Wafer Inspection

References

26

Neural networks for pattern recognition

Choice Reviews Online · 1994 · 18.7K citations

Computing, Computer Science, Computer Vision +13

Applied Multivariate Statistical Analysis.

Andrea Johnson, Dean W. Wichern · Biometrics · 1988 · 11.4K citations

Natural Sciences, Biostatistics, Statistical Computing +16

Principal Component Analysis

Colin Goodall, Ian T. Jolliffe · Technometrics · 1988 · 8.7K citations

Natural Sciences, Biostatistics, Data Analytics +5

Partial least-squares regression: a tutorial

Paul Geladi, Bruce R. Kowalski · Analytica Chimica Acta · 1986 · 6.9K citations

Business, Computer Science, Statistical Modeling +7

Estimating the Support of a High-Dimensional Distribution

Bernhard Schölkopf, John Platt, John Shawe‐Taylor et al. · Neural Computation · 2001 · 5.9K citations

Computing, Computer Science, Mathematics +12