Phase shifting SEM moiré method

Automated phase-measuring profilometry: a phase mapping approach

V. Srinivasan, H. C. Liu, M. Halioua · Applied Optics · 1985 · 207 citations

Engineering, Manufacturing Engineering, Equipment +15

Microcreep deformation measurements by a moire method using electron beam lithography and electron beam scan

Satoshi Kishimoto · Optical Engineering · 1993 · 85 citations

Natural Sciences, Materials Engineering, Materials Science +17

High precision deformation measurement by digital phase shifting holographic interferometry

Ming Chang, Ching-Piao Hu, Philip Lam et al. · Applied Optics · 1985 · 46 citations

Natural Sciences, Materials Science, Digital Imaging +16

Scanning moiré at high magnification using optical methods

David T. Read, J. W. Dally, M. Szanto · Experimental Mechanics · 1993 · 40 citations

Natural Sciences, Physics, Digital Imaging +13

Quantitative strain analysis of flip-chip electronic packages using phase-shifting moiré interferometry

M.R. Miller, Ilyas Mohammed, Paul S. Ho · Optics and Lasers in Engineering · 2001 · 34 citations

Engineering, Electrical Engineering, Materials Science +16