An optical fiber-taper probe for wafer-scale microphotonic device characterization

Abstract

A small depression is created in a straight optical fiber taper to form a local probe suitable for studying closely spaced, planar microphotonic devices. The tension of the "dimpled" taper controls the probe-sample interaction length and the level of noise present during coupling measurements. Practical demonstrations with high-Q silicon microcavities include testing a dense array of undercut microdisks (maximum Q = 3.3 x 10(6)) and a planar microring (Q = 4.8 x 10(6)).