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Influence of substrate temperature on the optical and piezoelectric properties of ZnO thin films deposited by rf magnetron sputtering

Materials EngineeringMaterials ScienceOptical MaterialsEngineeringOxide ElectronicsSubstrate TemperatureApplied PhysicsPiezoelectric PropertiesThin FilmsPulsed Laser DepositionOptoelectronicsZno Thin FilmsThin Film Processing