Chemical sensitivity of an ISFET with Ta2O5 membrane in strong acid and alkaline solutions

Ion Transport Phenomena in Insulating Films

E. H. Snow, Andrew S. Grove, B. E. Deal et al. · Journal of Applied Physics · 1965 · 524 citations

Engineering, Silicon On Insulator, Charge Transport +20

Microstructured solid-state ion-sensitive membranes by thermal oxidation of Ta

P. Gimmel, Klaus Schierbaum, W. Göpel et al. · Sensors and Actuators B Chemical · 1990 · 39 citations · Full text

Materials Science, Engineering, Ceramic Membrane +2

Investigation of pH-sensitive ISFETs with oxide and nitride membranes using colloid chemistry methods

Yu. G. Vlasov, Andrey Bratov, Yuri Tarantov · Sensors and Actuators B Chemical · 1990 · 18 citations

Catalytic Membrane, Chemical Engineering, Engineering +10