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Characterization of Ti–Zr–N films deposited by cathodic vacuum arc with different substrate bias

Materials ScienceMaterials EngineeringEngineeringCathodic Vacuum ArcDifferent Substrate BiasSurface ScienceApplied PhysicsTi–zr–n FilmsVacuum DeviceThin Film Process TechnologyThin FilmsChemical Vapor DepositionThin Film Processing