High performance germanium-on-silicon detectors for optical communications

Abstract

We demonstrate fast and efficient germanium-on-silicon p-i-n photodetectors for optical communications, with responsivities as high as 0.89 and 0.75 A/W at 1.3 and 1.55 μm, respectively, time response <200 ps and dark currents as low as 1.2 μA. Ge was epitaxially grown on Si by chemical vapor deposition, employing a low temperature buffer and cyclic thermal annealing to reduce the dislocation density. The overall performance is well suited for >2.5 Gb/s integrated receivers for the second and third fiber spectral windows.