Influence of hydrogen plasma thermal treatment on the properties of ZnO:Al thin films prepared by dc magnetron sputtering

Evaporated Sn-doped In2O3 films: Basic optical properties and applications to energy-efficient windows

I. Hamberg, C. G. Granqvist · Journal of Applied Physics · 1986 · 2.3K citations

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Hydrogen as a Cause of Doping in Zinc Oxide

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Materials Science, Semiconductors, Ii-vi Semiconductor +13

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Al-doped zinc oxide films deposited by simultaneous rf and dc excitation of a magnetron plasma: Relationships between plasma parameters and structural and electrical film properties

R. Cebulla, R. Wendt, K. Ellmer · Journal of Applied Physics · 1998 · 515 citations

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