Reliability of high vacuum measurements

Abstract

In order to allow the users of vacuum measurements to assess the reliability of their measurements, the current state of high-vacuum standards and gauging is reviewed. The discussion includes several types of high-vacuum primary standards currently in use, an assessment of probable errors for several types of hot filament ion gauges, user-controlled factors that may serve to increase the errors, and the information available to date on the performance of a commercially available molecular drag gauge. Examples are given of the introduction of additional errors by the improper application of vacuum gauges.